Hands-on Lithography Training Gives Students Practical Insight into Micro and Nanoscale Fabrication

A hands-on training session in lithography was held,on 23 October, as part of the EuroNanoLab Experts School: Lithography, bringing participants closer to the tools, processes, and challenges involved in micro and nanoscale device fabrication. 

The Experts School is designed for specialists in lithography technologies, creating a space to exchange ideas, discuss recent achievements, address technical challenges, and explore new developments in equipment hardware and processing techniques. 

During the practical session, students followed the complete fabrication process of a holographic optical component. The training covered key steps including substrate preparation, direct-write laser exposure of a designed mask, and etching, culminating in the creation of a hologram featuring the INL and MNF logos. 

Participants also took part in a detailed tour of the cleanroom facilities, where they were introduced to the tools and techniques used in day-to-day micro and nanofabrication work. 

By combining live demonstrations, real fabrication steps, and direct access to the cleanroom environment, the session offered students a practical understanding of how advanced lithography processes are carried out in a research and technology facility.